Ti–Si–C–N thin films grown by reactive arc evaporation from Ti3SiC2 cathodes

Microstructure evolution of Ti3SiC2 compound cathodes during reactive cathodic arc evaporation

The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are presented for different process conditions. The results show that phase decomposition takes place in the near-surface region, resulting in a 5–50 m thick converted layer that is affected by the presence of nitrogen in the deposition chamber. This layer consists of tw...

Characterization of nanocrystalline -Fe2O3 thin films grown by reactive evaporation and oxidation of iron

Iron oxide thin films, with an α-Fe2O3 phase, were deposited by two techniques. The first was evaporation of iron in vacuum, followed by oxidation through annealing in air. The second was reactive evaporation of iron in an oxygen atmosphere. This was also followed by annealing in air. The structural, morphological and chemical properties of the films were investigated. All films were polycrysta...

Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. When the target was sputtered under poisoned surface conditions, the film com...

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films from Ternary Cathodes

Optical , structural , and electrical properties of Mg 2 NiH 4 thin films in situ grown by activated reactive evaporation

Mg2NiH4 thin films have been prepared by activated reactive evaporation in a molecular beam epitaxy system equipped with an atomic hydrogen source. The optical reflection spectra and the resistivity of the films are measured in situ during deposition. In situ grown Mg2NiH4 appears to be stable in vacuum due to the fact that the dehydrogenation of the Mg2NiH4 phase is kinetically blocked. Hydrog...